Applications of Smart-Cut and Plasma Immersion Ion Implantation
碩士 === 國立臺灣大學 === 電子工程學研究所 === 96 === Smart-cut is a recently established advanced technology for fabricating high-quality silicon-on-insulator (SOI) systems and has been applied to many applications. Smart-cut process consists of direct wafer bonding and hydrogen-induced layer transfer technology....
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96858501085850365242 |