Atomic Force Microscopy (AFM) based Method Applications in Ultra Large Scale Integrated Chip (ULSI) for Semiconductor Failure Analysis
碩士 === 臺灣大學 === 電子工程學研究所 === 96 === Atomic Force Microscopy (AFM) based method of this thesis was indicated and established for its possible applications in semiconductor investigation. Based on three successful published papers (ISTFA: International Symposium for Testing and Failure Analysis), the...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17885638944989278453 |