| Summary: | 碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 96 === The purpose of this thesis is to develop a hydraulic-dual piezoelectric hybrid positioning control system with bi-directional large stoke, high load, high response and high precision, in which the variable rotational speed hydraulic pump driving hydraulic cylinders combines dual piezoelectric actuators positioning system. Due to the structure limit of the stack type piezoelectric actuator, the piezoelectric actuator allows big compression force, but small tension force and torque. The dual piezoelectric positioning system developed in this paper makes the two piezoelectric actuators having only compression force for applying in bi-directional high loading condition. The hydraulic servo system serves to position in coarse range and the dual-piezoelectric positioning system works in fine range to reach nanometer range positioning accuracy. The control system contains dual-input and single output. For that, adaptive fuzzy controller with self-tuning fuzzy slide-mode compensation (AFT-STFSMC) is used to design the hydraulic position controller and the dual-piezoelectric positioning controller. To solve the coupling interaction between the two subsystems, a decoupling controller is added. The simulation and experiment results show that the proposed hydraulic-dual piezoelectric system can achieve 20 nm accuracy with the stroke of 300 mm and the max. loading of 130 kgf.
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