| Summary: | 碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === This paper demonstrates the results of improvement of the sensor using laser annealing. A solid-state carbon dioxide (CO2) gas sensor based on NASICON solid electrolyte (Na2Zr2Si2P3O12) with a Li2CO3 auxiliary layer is fabricated by micromachining processes and the die size is 4 mm × 4 mm. In order to observe the sensor performance in the indoor CO2 concentration, the range of measurement of the CO2 concentration will be controlled in 700~4500 ppm. Re-crystalline by the heating of laser annealing changes the grain size and grain boundary of the NASICON layer, and the resolution of the sensor will be improved. There is the highest change of the sensor resolution when laser energy was controlled by 420 mJ, 1 Hz repetition rate, and 7 pulse number at the second time laser annealing. 39.62% resolution change in 1000~1700 ppm and 103.38% change in 1700~4500 ppm CO2 concentration can be observed.
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