Design and Fabrication of Blue-Laser Mach-Zehnder Modulator with Multi-Mode Interference Structures

• Main Authors: Yan-Tso Tsai, 蔡晏佐
• Other Authors: Way-Seen Wang
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/24302402497170439214

碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === In this work, Zn-Ni:LiNbO3 1×2 multimode interference power splitters and two kinds of Mach-Zehnder modulators operating at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the linewidth of the Zn-Ni co-diffused waveguides is found to be 1.6µm, and the optimal optical confinement of the waveguides is obtained by diffusing at 830ºC for 90 min when the thicknesses of nickel and zinc are 100 Å and 500 Å, respectively. The best 1×2 multimode interference power splitter exhibits a transmission of 75.12% as the width and the length of multimode interference region are 20μm and 600µm, respectively. The proposed Mach-Zehnder modulators with multimode interference structures operating at blue-laser wavelength are also demonstrated, and the halfwave voltage and the extinction ratio of the device are found to be 8.9V and 12.9dB, respectively. Moreover, the halfwave voltage and the extinction ratio of the Mach-Zehnder modulators with truncated branch structures are found to be 6.4V and 9.8dB, respectively.