Variable Optical Attenuator Made of Deformable Mirror Based on Micro-Electro-Mechanical System Technology

• Main Authors: Chao-Hu Li, 李朝湖
• Other Authors: Guo-Dung Su
• Format: Others
• Language: en_US
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/32316190366558174745

碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === An optical attenuator is one of the important components in optical communication system to control an optical signal transmission. It provides a variety of functions, such as power tuning of laser, dynamic gain controlling and equalizing of different channels in WDM system, and overload protection of optical device. In this thesis, we demonstrate a novel MEMS VOA made of polyimide thin film actuated by electrostatic force. We started with simulating the optical system by wave optics and constructed a model in optical system design software, ZEMAXTM. After, we fabricate a deformable mirror by micro-electro-mechanical system technology to serve as the main structure of the VOA. We assemble the deformable mirror to a bottom electrode by thermal bonging to form a DM-VOA. We measured the maximum optical attenuation is 30.8dB caused by the DM-VOA with 188V applied. The polarization dependent loss is very low due to geometric symmetric structure of the mirror, as simulated. The power consumption of the driving circuit is also measured, which is around 153mW. Therefore, we think the DM-VOA is a good potential for long-haul optical communication system using from these measured properties.