| Summary: | 碩士 === 國立臺灣師範大學 === 機電科技研究所 === 96 === By the high technology for next generation, ultra-precision position and micro displacement is the key object. Those years, the researcher used piezoelectric actuator and flexure hinges to do some design for nanometer position. In semiconductor process, beside IC design, there is a MEMS (Micro Electro Mechanical System), for which the advantage of flexure hinges to design sensor must be taken.
This study focus on the flexure hinges, searching relative papers to retrospection of recent advances. The flexure hinges were separated into two sorts: better flexibility easy to buckle and better rigidity to maintain position resolution. We use Taguchi method to design the static analysis parameters for flexure hinges and FEA (Finite Element Analysis) to analyse. It aims at to investigate the influence of the parameters on flexibility, stiffness, stress distribution, hence to identify the most significant parameters. Furthermore, according to the comparison of results of displacements and the stresses due to the changes of parameters of the structure, a novel design is proposed for designer to use. Finally, we design experiments to test and verify the results and discuss.
The relative size of optimal design can instinctively be obtained with Taguchi methods and FEA.
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