Design and Fabrication of Novel CMOS MEMS Micro-Optical Positioning and Focusing Stages

• Main Authors: Chih-Hsiang Yang, 楊智翔
• Other Authors: Weileun Fang
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/47608941805016374551

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 96 === This thesis presents a novel CMOS MEMS micro-optical stage. The stage contains a Fresnel lens in the center, and then combines in-plane and out-of-plane thermal actuators outside. Thus, the focal length can be tuned by out-of-plane thermal actuator, and focal point can be positioned by in-plane thermal actuator. Based on the fundamental framework, this study also extends other focusing lenses, like binary phase Fresnel lens, convex lens, and integrates polymer lens into Fresnel lens to be compound lens. The compound lens can change curvature by heating, further tune the focal length. By way of the following measurement and analysis, obtained complete focusing characteristics and static behavior, hoped that can have assistance in related researches or applications in the future.