TiN/Ti thin film on flexible PET substrate deposited by RF magnetron sputtering

TiN/Ti thin film on flexible PET substrate deposited by RF magnetron sputtering

碩士 === 國立清華大學 === 工程與系統科學系 === 96 ===

Bibliographic Details
Main Authors:	Jun-Liang Lin, 林俊良
Other Authors:	Jia-Hong Huang
Format:	Others
Language:	en_US
Published:	2008
Online Access:	http://ndltd.ncl.edu.tw/handle/91201195785348378561

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