Performance and Stability Analysis of EI Controller under Dynamic Models
碩士 === 國立清華大學 === 統計學研究所 === 96 === Run-to-run (R2R) process control is well developed in semiconductor manufacturing communities. The exponential weighted moving average (EWMA) controller that is a popular model-based R2R controller has received great attention in literature. However, in practical...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56744978412157175518 |