Microstructures Stiction Testing Using Light Diffraction Method

Microstructures Stiction Testing Using Light Diffraction Method

碩士 === 國立清華大學 === 動力機械工程學系 === 96 ===

Bibliographic Details
Main Authors: Kao-Yu Hsu, 許高毓
Other Authors: Weileun Fang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/78142251780044219241
id ndltd-TW-096NTHU5311116
record_format oai_dc
spelling ndltd-TW-096NTHU53111162015-11-27T04:04:17Z http://ndltd.ncl.edu.tw/handle/78142251780044219241 Microstructures Stiction Testing Using Light Diffraction Method 光繞射於微結構黏著檢測之應用 Kao-Yu Hsu 許高毓 碩士 國立清華大學 動力機械工程學系 96 Weileun Fang 方維倫 2008 學位論文 ; thesis 69 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 動力機械工程學系 === 96 ===
author2 Weileun Fang
author_facet Weileun Fang
Kao-Yu Hsu
許高毓
author Kao-Yu Hsu
許高毓
spellingShingle Kao-Yu Hsu
許高毓
Microstructures Stiction Testing Using Light Diffraction Method
author_sort Kao-Yu Hsu
title Microstructures Stiction Testing Using Light Diffraction Method
title_short Microstructures Stiction Testing Using Light Diffraction Method
title_full Microstructures Stiction Testing Using Light Diffraction Method
title_fullStr Microstructures Stiction Testing Using Light Diffraction Method
title_full_unstemmed Microstructures Stiction Testing Using Light Diffraction Method
title_sort microstructures stiction testing using light diffraction method
publishDate 2008
url http://ndltd.ncl.edu.tw/handle/78142251780044219241
work_keys_str_mv AT kaoyuhsu microstructuresstictiontestingusinglightdiffractionmethod
AT xǔgāoyù microstructuresstictiontestingusinglightdiffractionmethod
AT kaoyuhsu guāngràoshèyúwēijiégòuniánzhejiǎncèzhīyīngyòng
AT xǔgāoyù guāngràoshèyúwēijiégòuniánzhejiǎncèzhīyīngyòng
_version_ 1718137753257902080

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