A Study of Imprinting Process for the Fabrication of Metal/Polymer Bi-layer Nanostructures
碩士 === 國立清華大學 === 動力機械工程學系 === 96 === This thesis is focused on the influence of properties of substrate on formability of direct nanoimprint technique. Using silicon or glass material as the substrate for the direct metal imprint, it is found that higher imprinting force and fracture of mold may oc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60537275521206202861 |