MEMS based Microprobe for Neural Signals Measurement Application
碩士 === 國立清華大學 === 動力機械工程學系 === 96 === This study has successfully demonstrated a microprobe sensor for neural recording. The first Si based neural probe has been implemented on SOI (silicon-on-insulator) wafer and then employed to detect the neural signal of crayfish. Moreover, the polymer was depos...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84936890415327419992 |