Deposition of Hydrogenated Amorphous Carbon Film by Atmosphere Dielectric Barrier Discharges

碩士 === 國立清華大學 === 物理學系 === 96 ===

Bibliographic Details
Main Authors: Wen-Chao Huang, 黃文超
Other Authors: Chwung-Shan Kou
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/81037462897129365232

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