Fabrication and characterization of micro inductors on silicon substrate
博士 === 國立清華大學 === 材料科學工程學系 === 96 === In order to reduce the size of high-frequency communication devices, the general technology trend is to integrate both the active and passive components in the same substrate. The active components are generally fabricated on low resistivity silicon substrate. H...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61116982338575185025 |