The Analysis of Structural Dynamic of Piezo Driven Flexible Stage

• Main Author: 林相融
• Other Authors: 黃宜正
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/32737307586747480952

碩士 === 國立彰化師範大學 === 機電工程學系 === 96 === Abstract The main purpose of this thesis is to design different stages by using various flexible structures are achieved and derived there of dynamic equation and simulated results. The optimal parameters of the leaf spring or flexible hinge stage have been obtained by Taguchi method. Firstly we have derived the Lagrange’s equations of structures and obtain the dynamic characterization of the stages. Stage motion by using the finite element software of Pro/Mechanica is aimed to find the natural frequency and modal shape. The result shows that single-hinge structure and double-leaf spring structure reach the best dynamic behaviors. In this study we do not fabricate the stage, but through Taguchi method and CAE analysis software we provide a method to design and compare with different precision positioning stages with a variety of flexible structures. Contribution to the precision industry and MEMS process equipments technology is expected. Keywords: Piezo-Microposition stage, Flexible hinge, Leaf spring,Taguchi Method, Dynamic Analysis.