Photonic and Electric Properties of Hydrogenated Silicon Thin Films

碩士 === 國立中央大學 === 光電科學研究所 === 96 === In this article, we discuss our research regarding the intrinsic layer of solar cells. In this study we utilized pulsed DC magnetron sputtering for the PVD fabrication process as this was the more environmentally sound method. We looked at the relationship betwee...

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Bibliographic Details
Main Authors: Hung-Ju Lin, 林宏儒
Other Authors: Sheng-Hui Chen
Format: Others
Language:en_US
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/08849010959268084115