Photonic and Electric Properties of Hydrogenated Silicon Thin Films
碩士 === 國立中央大學 === 光電科學研究所 === 96 === In this article, we discuss our research regarding the intrinsic layer of solar cells. In this study we utilized pulsed DC magnetron sputtering for the PVD fabrication process as this was the more environmentally sound method. We looked at the relationship betwee...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/08849010959268084115 |