The Investigation of Transient Stripe Coating Process
碩士 === 國立中央大學 === 機械工程研究所 === 96 === Coating methods are widely used in the traditional, MEMS-related and semiconductor industry. In order to select the working parameters of the process correctly and simply, the study of the influences of related properties on the coating process becomes very impor...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/vq3465 |