Study of Nucleation, Mergence, Growth of Gas Film by Hydrogen Plasma to Split Nano-Scale Layer from Substrate

Study of Nucleation, Mergence, Growth of Gas Film by Hydrogen Plasma to Split Nano-Scale Layer from Substrate

碩士 === 國立中央大學 === 機械工程研究所 === 96 === This research investigates the feasibility of the hydrogen plasma immersion ion implantation system (PIII) replacing the conventional ion implantation step in Smart-cut process. PIII system offers several advantages such as large implanted area, high throughput,...

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Bibliographic Details
Main Authors:	Ping-Jung Wu, 巫秉融
Other Authors:	Tien-His Lee
Format:	Others
Language:	en_US
Published:	2008
Online Access:	http://ndltd.ncl.edu.tw/handle/63410376668940048747

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