Study of Nucleation, Mergence, Growth of Gas Film by Hydrogen Plasma to Split Nano-Scale Layer from Substrate
碩士 === 國立中央大學 === 機械工程研究所 === 96 === This research investigates the feasibility of the hydrogen plasma immersion ion implantation system (PIII) replacing the conventional ion implantation step in Smart-cut process. PIII system offers several advantages such as large implanted area, high throughput,...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63410376668940048747 |