Periodic arrays 2D well-ordered nanostructures fabricated via nanosphere lithography
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 96 === In the present study, we have demonstrated that 2D periodic arrays of nickel metal and silicide nanodots can be successfully fabricated on (111)Si substrates by using the polystyrene (PS) nanosphere lithography (NSL) technique and thermal annealing. The resu...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31538189638263127424 |