Real-Time and Label-Free Detection of the Biomolecules with a Novel Side-Gated SiNW-FET Biosensor

• Main Author: 夏德玲
• Other Authors: 柯富祥
• Format: Others
• Language: en_US
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/51525371737386377340

碩士 === 國立交通大學 === 奈米科技研究所 === 96 === It is an important and developing capable issue to combine the semiconductor sensor devices with biomolecules for the future application of disease diagnosis. In the present work, the BRAFV599E mutation gene and cancer marker α-fetoprotein, which have been recently reported to restrict to the papillary thyroid carcinomas (PTCs) and liver cancer, respectively, were chosen as the target biomolecules. The devices based on semiconductor nanowires exhibit high sensitive and selective characteristics for the real-time, label-free, and excellent specificity detection of biomolecules and chemical species. A novel side-gate silicon nanowire field effect transistor (SiNW-FET) is fabricated by using the complementary metal oxide semiconductor (CMOS) FET compatible technology. The shrank nanowires with higher surface-to-volume ratio and individual side-gate for integration are achieved by the LOCOS process. Because of the above advantages, the devices have potential to integrate with microfluidic system for bio-detection application. Therefore, the detection strategy for PTC and liver cancer has been investigated with our SiNW-FET integration with microfluidic system for real-time sensing by measuring thecharacteristics of electrical signals. The FT-IR, fluorescence microscopy and UV spectrophotometer are also examined to check out our efficiency of the SAM and appropriate experimental parameters for bio-sensing. In the conclusion, the width of shrank nanowire by LOCOS process can be thinner than 100 nm. The drain current versus gate voltage (ID-VG) characteristic of the SiNW-FET exhibits about five orders of magnitude of Ion/Ioff ratio, and the threshold voltage shifts positively after hybridization of 100fM concentrations of BRAFV599E mutation gene and 3ng/mL concentrations of the cancer marker, α-fetoprotein, respectively. The results show that the side-gate nanowire device has the capability of acting as a real-time, label-free, highly sensitive and excellent selectivity SiNW-FET biosensor for important biomolecules. In addition, our approach offers a highly potential possibility to integrate with microfluidic-channel system for future parallel real-time detection of multiple chemical and biological species with controlling the individual side-gate in a single integrated chip.