The Enhancement of the Sensitivity for SiGe Nanowire Bio-sensor by Oxidation

碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 96 === Si nanowires (SiNWs) have been studied for Bio-sensor in recent years. However, as far as sensitivity is concerned, SiGe nanowires are more promising than Si nanowires because of SiGe nanowires have higher change in drive current when the same chemical sp...

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Bibliographic Details
Main Authors: Wen-Chuan Chao, 趙文全
Other Authors: Tahui Wang
Format: Others
Language:en_US
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/325pg2