A study of the current and charge sensing circuits for micropositioners
碩士 === 國立交通大學 === 機械工程系所 === 96 === Micropositioner, which provides the advantages such as high precision, the driving capability on wide-frequency bandwidth and the lower costs, belongs to Micro-electromechanical Systems (MEMS). Therefore it is widely used in the magnetic or optical storage device....
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/41402842939586243550 |