Comparing Quality Cost of Different Monitoring Methods in Silicon Wafer Manufacturing Process

碩士 === 國立交通大學 === 管理學院碩士在職專班管理科學組 === 96 === Integrated circuit virtually created the foundation for the entire field of modern microelectronics. Silicon wafer is one of the most important raw materials for IC. Silicon wafer manufacturing is a mature industry and there are around 10 vendors in the...

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Bibliographic Details
Main Author: 徐方元
Other Authors: 姜齊
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/10067024391063424385