Study on the Polycrystalline Silicon Thin-Film Transistors with Location-Controlled Grain Boundary and Multi-Gate Stucture Using Excimer Laser Annealing
碩士 === 國立交通大學 === 電子工程系所 === 96 === In recent years, polycrystalline silicon (poly-Si) thin film transistors (TFTs) were the key devices in flat-panel display technology and System on a Panel (SOP) applications due to its high mobility. Although conventional excimer laser can transfer amorphous Si t...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/4zekmh |