Study of High Frequency Broadband Surface Acoustic Wave Filter

碩士 === 國立交通大學 === 電子工程系所 === 96 === This work studied the fabrication of broadband surface acoustic wave (SAW) filters with the center frequency at 2.1GHz on GaAs and LiNbO3 piezoelectric substrates by electron beam lithography. By using the conventional interdigital transducer (IDT) and the slanted...

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Bibliographic Details
Main Authors: Chang-Sheng Liao, 廖昌盛
Other Authors: Sheng-Di Lin
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/36171984120749607605