Enhancement of Metal-induced Lateral Crystallization Growth Rate by Rapid Thermal Annealing
碩士 === 國立交通大學 === 材料科學與工程系所 === 96 === Two annealing methods of fabricating low temperature poly Silicon(LTPS) thin film transistor (TFT) were discussed in this study.In order to achieve the low temperature process, we used metal-induced lateral crystallization(MILC) to fabricate it . Ni can lower t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14096293610098534671 |