Effect of plasma post-treatment on the surface characteristic of carbon nanotubes

• Main Authors: Yao-Tsung Yeh, 葉耀琮
• Other Authors: Chang-Ping Chou
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/96920460681736192051

碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 96 === Abstract This thesis studies the effect of plasma post-treatment on the surfacecharacteristic of carbon. nanotubes. The first topic is the 300W CF4 plasma to studies the structure and surface quality after growth of .carbon .nan-otubes.The second. topic focuses consider the 300W CF4/O2 plasma after growth of .carbon .nanotubes.The. third 1topic use CF4、CF4/O2 to carbon .nanotubes .which in via after plasma post-treatment. Surface shape and qu-ality a variation.Portion analysis includes scanning .electron .microscopy (SEM), transmission electron (microscopy (TEM), atomic force microscopy .(AFM) are used (to determine .surface1roughness and image .surface .topography. Element bonding is measured by. Fourier.-.transform.infrared .spe-ctroscopy ((FTIR). X-ray Photoelectron Spectroscopy (XPS) Termal Desorption Spectroscopy (TDS). . After. H2 .plasma .pre-treatment, Ni catalyst layer becomes island.-. like. .because of thermal energy and etching effect of H2 plasma and.these island.-.like Ni particle plays an important role in the subsequent growth of .carbon. nanotubes. If the size of Ni catalyst. particle. is .small, the .diameter .of carbon nanotubes is also small. .The .structure .of .carbon . nanotubes .does. not have obvious damage after H2 and CF4 plasma.treatment but CF4/O2 .plasma .shorten .the .length .of .carbon .nanotubes. This phenomenon also can find in carbon nanotubes growth in via. Interconnection will introduce carbon nanotubes instead of traditional .metal. in. the .future .and. We .report. an approach to shorten the1 length 1of1 carbon 1nanotubes .