Nonvolatile memory with gate of self-assembled nanostructures of silicon quantum-dots in mesoporos silica

碩士 === 國立交通大學 === 光電工程系所 === 96 === In this thesis, a new class of artificially engineered ferroelectric-like materials synthesized by embedding three-dimensional arrays of Si nanocrystals in mesoporous silica matrix was reported. We attribute the measured polarization switching to polar layers lyin...

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Bibliographic Details
Main Authors: Jian-Da Huang, 黃建達
Other Authors: Hao-Chung Kuo
Format: Others
Language:en_US
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/20769402143275645892
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Summary:碩士 === 國立交通大學 === 光電工程系所 === 96 === In this thesis, a new class of artificially engineered ferroelectric-like materials synthesized by embedding three-dimensional arrays of Si nanocrystals in mesoporous silica matrix was reported. We attribute the measured polarization switching to polar layers lying at the interfaces between one-side bonded Si nanocrystals and mesoporous silica matrix. A metal-oxide-semiconductor field-effect transistor with the ferroelectric-like material in place of the gate dielectrics was fabricated to demonstrate its high potential for the silicon-based nonvolatile random-access memories.