Multi-layer growth CuAlO2 and effects of doping Fe2O3

• Main Authors: Alvin Chuang, 莊志平
• Other Authors: JCA Huang
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/99423827754407353441

碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 96 === In this study,we deposited CuAlO2 thin films on Al2O3(0001) substrate by ion beam sputter. The first work we deposited [CuO(10Å)/Al2O3(10Å)] multi-layers ,and 1100℃ annealed samples under argon ambience in order to get CuAlO2 thin films. The second work we deposited [CuO(10 Å)/Fe2O3(1Å、3 Å)/Al2O3(10 Å)] multi-layers ,and 1100℃ annealed samples under argon ambience .The structural ,electrical ,and magnetic properties of annealed samples have been investigated. The ferromagnetism of [CuO(10 Å)/Fe2O3(1 Å、3 Å)/Al2O3(10 Å)] increased after 400℃ annealing under oxygen ambience but decreased under argon ambience. The results suggest that ferromagnetism in [CuO(10 Å)/Fe2O3(1 Å、3 Å)/Al2O3(10Å)] comes from an intrinsic factor highly correlated to defects. We will go on studying to find the origin of ferromagnetism exactly.