Design and Fabrication of Surface Force Apparatus with Multiple Beam Interferometry

• Main Authors: Chieh-chung Chung, 鍾傑仲
• Other Authors: Terry Yuan-Fang Chen
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/00037353974674444760

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 96 === The material shows remarkable different characteristic and phenomenon in nano-scale. It is necessary to use accurate measuring technology and build a system to understand and control the material characteristic. The surface force apparatus not only used in the measurement of thin film thickness and refractive index but also in the analysis of mechanics between thin films, for example: surface absorbability, adhesion, friction force. Therefore the surface force apparatus can be used as one of the important tools to study nano science and technology. In this thesis, the main purpose is to build a surface force apparatus according to multiple beam interferometry based on symmetrical three-layer formula, including self-designed exerting normal and shear force mechanism. The surface force apparatus can measure the deformation of mica under a normal force and the friction behavior of mica under a shear force, then comparing the results with Hertz、JKR contact theory and the coefficient of friction with published paper respectively to verify the accuracy of the surface force apparatus.