The Study of Nanocrystalline Silicon Thin Film Transistor on Flexible Plastic Substrate by Hot-Wire Chemical Vapor Deposition
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 96 === In the thesis, we studied and optimized the different growing parameters such as using planarization barrier oxide, depositing temperature, and the distance between tungsten wire heater and substrate, and deposition time to prepare the nanocrystalline silicon...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43224643058193635157 |