Investigation of Schottky Contact-Type Hydogen Sensors
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === In this dissertation, a series of Schottky contact-type hydrogen sensors are proposed. By using the catalytic metals (Pd or Pt) as the gate materials, the hydrogen molecules will be dissolved as hydrogen atoms. Part of those hydrogen atoms will diffuse throu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66388166434655362685 |