| Summary: | 碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 96 === Carbon Nanotube-polyimide composite is an extrinsically conducting polymer (ECP), the polymer can not conduct electricity, so it needs to add an electricity conducting filler to make it conduct electricity. In this study, Multi wall carbon nanotube - polyimide (MWNT-PI) can be fabricated to become Nano composites with the synthesis: in situ polymerization. Based on the observation, MWNT-PI can greatly improve in electric properties. It explains the synthesis can successfully promote the electric properties with low concentration of MWNT. In addition, the synthesis discovers that the temperature and resistance relationship of MWNT-PI has semi-conductor property. The pressure and resistance of this composite also have linear relationship and recoverable
property.
After finding above characteristic, we try to fabricate a MEMS size sensor. UV-LIGA process in the micro piezo-resistive pressure sensor process, we use MWNT-PI thin film to provide output electrical signal induced by input pressure disturbance , and the structural layer itself is defined by the micro mold, which consists of photoresist SU-8. It is crucial to control the temperature and time when it comes to the soft baking process for thick photoresist. Back etch glass substrate to get a cavity. In the end, the sensor testing answers to a pressure sensor. Therefore, the study has shown a valuable method which can be used in conductive polymer, and pressure sensor.
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