Fabrication and characterization of non-evaporable nanostructured porous Ti and Ti-Zr-V film getters
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === According to the progress of microelectromechanical system (MEMS) technologies, the developments of the minimizing vacuum devices have largely increased for the past few years. The features of these devices are the wafer-level bonding fabrications and small...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53175178050413228623 |