Investigation on Properties of Tin, Titanium and Chromium-Doped Indium-Tin-Oxide Film by Dual Targets RF Magnetron Sputtering System
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === The main purpose of this study is to investigate the opto-electronic properties of indium-tin-oxide (ITO) and ITO doped with metals such as tin, titanium and chromium, respectively. The films were deposited on glass substrates by dual-target RF magnetron sp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77098090961024634002 |