Experimental and Finite Element Analysis in Excimer-Laser Crystallization of a-Si Films
博士 === 國立成功大學 === 工程科學系碩博士班 === 96 === In the fabrication of a poly-Si film, an amorphous silicon (a-Si) thin layer on glass substrate is melted by the irradiation of a excimer laser with nanosecond duration, and then is cooled down to form the poly-Si one. In this thesis, the excimer-laser-induced...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/09223122789656117530 |