A Study of 8" Wafer Pod Doors
碩士 === 國立成功大學 === 工程科學系專班 === 96 === In this thesis, a laser ranging sensor non-contact measuring tool based on optical path and real time data analysis has been developed and is used in 8” Fab. Currently, The laser sensor measuring tool is used to measure pod door distortion and to screen filter t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07207581130470596585 |