Designing a novel paddle cantilever beam in measurement of the mechanical behavior of copper thin films

• Main Authors: Hsin-Nan Hsu, 許信男
• Other Authors: Ming-Tzer Lin
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/60140093193839524668

碩士 === 國立中興大學 === 精密工程學系所 === 96 === In this thesis ,a new technique for studying the mechanical behavior of nano-scale thin metal films on silicon substrate is presented. The test structure was designed on this novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane stress distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the “paddle”cantilever beam and then measure the deposited thin metal film materials on top of it. The optical interference technique was used to measure the deflection of beam with the force.