The Application of Artificial Neural Network in Virtual Metrology System
碩士 === 國立中興大學 === 資訊科學與工程學系 === 96 === In the semiconductor or TFT-LCD panel industry, the shorter the production cycle the faster the rate on returns (ROR). The production processes are divided into manufacturing and metrology processes. Manufacture process cycle times are unable to do be reduced....
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/76392448853209693837 |