Fabrication of patterned alumina-metal coaxial nanorod arrays

• Main Authors: Che-Wei Hsu, 許哲瑋
• Other Authors: 王國禎
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/95831732090092354046

碩士 === 國立中興大學 === 機械工程學系所 === 96 === In this research, the orderly uneven barrier-layer surface of an anodic aluminum oxide (AAO) membrane was used as a template. The surface structure of the barrier-layer was modified by etching using phosphoric acid. Following, certain specific area of the barrier-layer was then removed by photolithographic process. A thin Au film was deposited on the photolithographic patterned barrier-layer surface by evaporation as the electrode for further electrochemical deposition. Nickel nanorods were electrochemically deposited into the nanochannels of the patterned AAO template. Phosphoric acid was then used to gradually etch off the alumina that enclosed each individual metal nanorod to form a alumina-metal coaxial nanorod array. The alumina/nickel coaxial structure was characterized by energy dispersive X-ray (EDS) analysis, transmission electron microscope (TEM) analysis, and selected area electron diffraction (SEAD) analysis. The high aspect ratio of the alumina-metal coaxial nanorods with the alumina shell insulator are suitable for use as nano probes or electrodes capable of penetrating the cell membrane, and hence being able to sense the biological functions within the cells.