Laser annealing of metallic contacts on single helical carbon nanofiber
碩士 === 國立中興大學 === 物理學系所 === 96 === In this thesis we present the experimental results on fabrication and measurement of electronic devices based on helical single-carbon nanofibers. The metal/carbon-nanofiber contacts of these devices were defined by electron beam lithography and further annealed by...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64518179747735024199 |
| Summary: | 碩士 === 國立中興大學 === 物理學系所 === 96 === In this thesis we present the experimental results on fabrication and measurement of electronic devices based on helical single-carbon nanofibers. The metal/carbon-nanofiber contacts of these devices were defined by electron beam lithography and further annealed by laser beams for reduction of contact resistances. The laser annealing has several advantages: First, the laser anneal may provides higher annealing temperatures. Second, the position of the luminous spot, which can be as small as 100
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