Fabrication of post plasma treated aluminum doped zinc oxide thin films for solar cell applications
碩士 === 國立中興大學 === 光電工程研究所 === 96 === The experiment can be divided into two sections: AZO films are prepared by r.f. magnetron sputtering system and PECVD follows up a post plasma treatment on the pre-sputtering films. The related influences of substrate temperature, working pressure and different H...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/30749297180337715037 |