| Summary: | 碩士 === 明志科技大學 === 機電工程研究所 === 96 === In this purpose we utilized COC (Topas Cyclic Olefin Copolymers) to substitute for the other polymer material. It is not only to get better heat transfer and to resist an unexpected change of a pattern, but also to fabricate the heater of bio-chip by MEMS (Micro-Electro-Mechanical System).
In previous research, the polymer material TPX (Poly-4-methy1-pentene-1) of sputtering Cr (Chromium) and Pt (Platinum) was used to be the heater. In the heating test, the temperature of the heater was increased to 50℃, the TPX substrate was deformed because of the heat accumulation. This resulted in destroying the sputtered layer of heater, and the polymer chain reaction couldn’t be completed. We fabricated the heaters by using different metals sputtered on the COC material, and the metals included Au (Gold), Ag (Silver), and Ti (Titanium).
It was hoped to find better groups of design factors by CFD-ACETM (Computational Fluid Dynamics, CFD Research Corporation, Alabama, USA) software. It was not only effective to reduce the time and cost of fabrication, but also to get the higher efficiency by the simulation and experimentation of the heater design.
Using MEMS processes, we fabricated the micro-heaters of different metal thin film thicknesses, and the PCR chip was completed by UV (ultra-violet) bonding system. Then one could control the temperature of the PCR chip by Lab View operation systems, and the results after polymerase chain reaction for the Escherichia coli TG-1 cells’ DNA was obtained. The results of the DNA amplifying 225 bps were 0.68 – 0.82 ng/µl.
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