A study on the fabrication of microchannel by using YAG laser technology
碩士 === 高苑科技大學 === 電子工程研究所 === 96 === To date, microchannel fabrication mostly still used LIGA-like, sacrificial layer, and reactive ion etch technologies. These fabrication technologies have co-disadvantages “spend too much time”, and also need higher environment controlled, accurate devices, and co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39928813575785557725 |