Development of a Thick Film Process Technology for Micro Linkage Mechanism Fabrication
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 96 === This research proposes a novel fabrication method for polymer-based micro linkage mechanism using thick film process. The method applies metal mask layer, anti-reflection layer and sacrificial layer so the linkage can be made without assembly. The polymer-...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33005989014511598988 |