Study of Optical and Electrical Properties for Microcrystalline Silicon Thin Films Prepared by ICP-CVD
碩士 === 崑山科技大學 === 機械工程研究所 === 96 === To improve the efficiency of the solar cell device a microcrystalline silicon (µc-Si:H) thin film fabricated by the inductively coupled plasma chemical vapor deposition is studied. Several process parameters such as the hydrogen (H2) gas flows, the substrate temp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jqqaz8 |