A silicon-based micro-cantilever bandpass filter design and modeling
碩士 === 義守大學 === 電機工程學系碩士班 === 96 === Silicon-based micromechanical device design is an emerging field of research with application in a wide variety of area, such as resonators in Radio Frequency(RF)communication, switches in optical networking, and sensors in environmental monitoring. In this study...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/68233127311047103281 |