| Summary: | 碩士 === 逢甲大學 === 機械工程學所 === 96 === This study uses the finite element software ANSYS and experiment to investigate the dynamic performance of Electro-Thermal Micro-actuators. It shows that the computed results are very close to the experimental data in addition to having the same trend. Under the same applied voltage with different loading frequencies, the micro-actuator yields the larger lateral displacement for the lower loading frequency. The lateral displacement of the micro-actuator will decrease with the increase of either the gap value or the width of its hot arm. When the length of its cold arm is approximately 200μm, the structure has the largest lateral displacement at its tip.
While the micro-actuator is under operation, joule heat due to electro-thermal effect and heat generated by the alternating bending phenomenon will be accumulated in its hot arm. This study shows that the lower actuating frequency yields the longer time for heat accumulation and then induces the higher temperature, which cause the Young''s modulus of poly-silicon structure to drop in the high temperature region. The decrease of Young''s modulus will cause the bending stiffness of the structure to drop, which in turn brings about thermal buckling in the high temperature region of the hot arm after repeated heat accumulation for a long time. The experimental results indicate that the life of the structure is the longer when the loading frequency is the higher under the same applied voltage. When the loading frequency is 20Hz, the life of the structure is the longer when the gap value is the larger.
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